DRK8090 Sawirka Korontada

Qalabkani waxa uu qaataa habka cabbiraadda interferometric-ka ee aan la xidhiidhin, weji-isbedelka indhaha, ma dhaawici karto dusha sare ee workpiece inta lagu jiro cabbirka, si dhakhso ah ayuu u cabbiri karaa sawirada saddex-geesoodka ah ee dusha sare ee micro-topography of workpieces kala duwan, iyo falanqaynta iyo xisaabinta cabbirka natiijooyin.

Sharaxaada Alaabta
Astaamaha: Ku habboon cabbirka qallafsanaanta dusha sare ee blocks cabbirrada kala duwan iyo qaybaha indhaha; qoto dheer ee reticle ee taliyaha iyo garaaca; dhumucda dahaarka ee qaab-dhismeedka jeexdin iyo qaab-dhismeedka qaab-dhismeedka xadka daahan; dusha sare ee magnetic (optical) disk iyo madaxa birlabeedka cabbirka qaabdhismeedka; qallafsanaanta dusha sare ee silikoonka iyo cabbirka qaab dhismeedka, iwm.
Sababtoo ah saxnaanta cabbirka sare ee qalabka, waxay leedahay sifooyinka aan la xiriirin iyo cabbirka saddex-geesoodka ah, waxayna qabataa xakamaynta kumbuyuutarka iyo falanqaynta degdega ah iyo xisaabinta natiijooyinka cabbirka. Qalabkani wuxuu ku habboon yahay dhammaan heerarka baaritaanka iyo cabbiraadda unugyada cilmi-baarista, qolalka cabbiraadda warshadaha iyo macdanta macdanta, aqoon-is-weydaarsiyo sax ah, iyo sidoo kale ku habboon Machadyada tacliinta sare iyo machadyada cilmi-baarista sayniska, iwm.
Qodobbada ugu muhiimsan ee farsamada
Cabbiraadda kala duwanaanshaha qoto dheer ee sinnaan la'aanta dusha sare
Dusha sare ee joogtada ah, marka aanu jirin dhererka isbeddel degdeg ah oo ka weyn 1/4 hirarka u dhexeeya labada pixels ee isku xiga: 1000-1nm
Marka uu jiro isbeddel dherer ka weyn 1/4 ee hirarka dhererka u dhexeeya labada pixels ee isku xiga: 130-1nm
Ku celcelinta cabbirka: δRa≤0.5nm
Weyneynta muraayadaha ujeeddada: 40X
Daloollada tirada: Φ 65
Fogaanta shaqada: 0.5mm
Qalabka muuqaalka muuqaalka: Φ0.25mm
Sawirka: 0.13×0.13mm
Weyneynta Qalabka Muuqaal: 500×
Sawirka (waxaa lagu arkay shaashadda kumbuyuutarka) -2500×
Isku dhafka cabbiraadda qaataha: 1000X1000
Cabbirka Pixel: 5.2×5.2µm
Waqtiga cabbiraadda muunada (sawirka) wakhtiga: 1S
Muraayada caadiga ah ee qalabka (sare): ～50%
Milicsiga (hoose): ～4%
Isha iftiinka: nalka shidan 6V 5W
shaandheynta Cagaaran dhererka hirarka: λ≒530nm
Balaadhka kala badh λ≒10nm
Qaadista mikroskoob ee ugu weyn: 110 mm
Qaadista miiska: 5 mm
Baaxadda dhaqdhaqaaqa jihada X iyo Y: ～10 mm
Baaxadda wareega ee miiska shaqada: 360°
Jaangooyooyinka miiska shaqada: ± 6°
Nidaamka Kombiyuutarka: P4, 2.8G ama ka badan, 17-inji shaashad fidsan oo leh 1G ama ka badan